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Semiconductor Robot Product List

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Semiconductor Robot SCR3100S-PM

Semiconductor Robot SCR3100S-PM

Super Clean Room 3-Axis Cylindrical Coordinate Clean Robot SCR3100S Series

By reducing the footprint, it is suitable for the transport of small-diameter wafers within semiconductor manufacturing equipment and inspection equipment, allowing for a more compact equipment layout.

  • Other industrial robots
  • Semiconductor Robot

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